NGUYEN, Trung Do; LUU, Thi Lan Anh; LE, Thi Hong Lien; NGUYEN, Hoang Thoan; NGUYEN, Ngoc Trung. Studing the Effect of Etching Process on the Ohmic Specific Contact Resistance of AlGaN/GaN HEMT. JST: Engineering And Technology For Sustainable Development, [S. l.], v. 31, n. 2, p. 95–100, 2021. DOI: 10.51316/jst.149.etsd.2021.31.2.16. Disponível em: https://jst.vn/index.php/etsd/article/view/216. Acesso em: 30 jun. 2025.