TRINH, Quang Thong; NGUYEN, Thi Huong Lan; TRIEU, Viet Phuong; JUDITH L., MacManus-Driscol. Study on Fabrication and Material Properties of Al Doped ZnO Films Prepared by Atmospheric Atomic Layer Deposition. JST: Engineering And Technology For Sustainable Development, [S. l.], v. 31, n. 4, p. 85–92, 2021. DOI: 10.51316/jst.153.etsd.2021.31.4.15. Disponível em: https://jst.vn/index.php/etsd/article/view/257. Acesso em: 26 jun. 2025.