VU, Thi Thanh Huong; BATENBURG, Kevin M.; AARNINK, Antonius A.I.; KNEŽEVIĆ, Tihomir; LIU, Xingyu; NANVER, Lis K. Batch furnace CVD of pure boron layers on Si and GaN substrates for low-leakage-current diode fabrication. JST: Engineering And Technology For Sustainable Development, [S. l.], v. 33, n. 2, p. 29–35, 2023. DOI: 10.51316/jst.165.etsd.2023.33.2.5. Disponível em: https://jst.vn/index.php/etsd/article/view/334. Acesso em: 23 jun. 2025.