Trinh, Quang Thong, Thi Huong Lan Nguyen, Viet Phuong Trieu, and MacManus-Driscol Judith L. 2021. “Study on Fabrication and Material Properties of Al Doped ZnO Films Prepared by Atmospheric Atomic Layer Deposition”. JST: Engineering And Technology For Sustainable Development 31 (4):85-92. https://doi.org/10.51316/jst.153.etsd.2021.31.4.15.