Vu, Thi Thanh Huong, Kevin M. Batenburg, Antonius A.I. Aarnink, Tihomir Knežević, Xingyu Liu, and Lis K. Nanver. 2023. “Batch Furnace CVD of Pure Boron Layers on Si and GaN Substrates for Low-Leakage-Current Diode Fabrication”. JST: Engineering And Technology For Sustainable Development 33 (2):29-35. https://doi.org/10.51316/jst.165.etsd.2023.33.2.5.