Trinh, Quang Thong, et al. “Study on Fabrication and Material Properties of Al Doped ZnO Films Prepared by Atmospheric Atomic Layer Deposition”. Engineering and Technology For Sustainable Development, vol. 31, no. 4, Oct. 2021, pp. 85-92, doi:10.51316/jst.153.etsd.2021.31.4.15.