DANG, Van Hieu; LE, Van Tam; NGUYEN, Van Duong; CHU, Manh Hoang; DANG, Van Hieu. Design and Simulation of Scanning Probe Micro-Cantilever for the Scanning Probe Lithography. Old Journal, [S. l.], n. 137, p. 84–88, 2019. Disponível em: https://jst.vn/index.php/old/article/view/614. Acesso em: 2 aug. 2025.