Phan, V. M., Nguyen, T. S. and Pham, H. P. (2017) “Study on Impact of Low Load to Frictional Coefficient of Silicon – Silicon Couple in MEMS Devices”, Old Journal, (117), pp. 44–48. Available at: https://jst.vn/index.php/old/article/view/453 (Accessed: 2 August 2025).