Dang, Van Hieu, Van Tam Le, Van Duong Nguyen, Manh Hoang Chu, and Van Hieu Dang. “Design and Simulation of Scanning Probe Micro-Cantilever for the Scanning Probe Lithography”. Old Journal, no. 137 (September 15, 2019): 84–88. Accessed August 2, 2025. https://jst.vn/index.php/old/article/view/614.