Deposited CrN Layer on SKD61 Substrate using Pulse DC Magnetron Sputtering
Main Article Content
Abstract
This paper discusses about the CrN layer coating on SKD61 substrate with pulse DC magnetron sputtering by B30-V type system. The vacuum system has low power pulses, residual stress and pulse frequency varied in the range from 8 kHz to 150 kHz. The result indicates that when increasing the pulse frequency from 8 kHz to 150 kHz, the residual stress decreases significantly (about 4.11 GPa to 0.41 GPa). The surface roughness Ra reduces from 7.1 down to 4.2 µm. The X-ray diffraction (XRD) of CrN coating shows that the film has the strong peak stabilization at (111), (200) and (220). The mechanical properties of coating layers are evaluated by nanohardness and residual stress under the surface (200) was 4.11 GPa in case of frequency pulse 150 kHz.
Keywords
Pulsed DC sputtering, CrN coating, Pressure molding, Residual stress
Article Details
References
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[3] P.J.C. Avelar-Batista et all “Effect of coating thickness and deposition methods on the stripping rate of Cr-N coatings”, Surface & Coatings Technology 200 (2005) 1842-1848.
[4] O. Salas, K. Kearns, S. Carrera, J.J. Moore “Tribological behavior of candidate coatings for Al die casting dies”, Surface and Coatings Technology 172 (2003) 117-127.
[5] Eduardo K. Terdandtini, Augusto Q. Kunrath, Cesar Aguzzoli, Maria Casto, John J. Moore, Israel J.R. Baumvol, “Soldering mechanism in materials and coatings for aluminum die casting”, Surface and Coatings Technology 200 (2008) 3764-3771.
[6] J. Lin, S. Carrera, A.O. Kunrath, D. Zhong, S. Myers, B. Mishra, P. Ried, J.J. Moore “Design methodology for optimized die coatings: The case for aluminum pressure die-casting”, Surface and Coatings Technology 201 (2006) 2930-2941.
[7] F.D. Lai, J.K. Wu “Structure, hardness and adhesion properties of CrN films deposited on nitrided and nitrocarburized SKD 61 steel-coets”, Surface and Coatings Technology 88 (1996) 183-189.
[8] Lugscheider, K. Bobzin, Th. Horning, M. Maes “Investigation of the residual stresses and mechanical properties of (Cr,Al)N or PVD coatings used for semi-solid metal (SSM) forming dies”, Thin Solid Films 420-421 (2002) 318-323.
[9] M.A. Glefti, G.M. La Vecchia, N. Lecis, S. Troiolo “Relationship between through-thickness residual stress of CrN-PVD coatings and fatigue nucleation sites”, Surface & Coatings Technology 192 (2005) 263-268.
[10] V.D. Ovcharenko, A.S. Kuprin, G.N. Tolmachova “Deposition of chromium nitride coatings from vacuum arc plasma in increased nitrogen pressure” Plasma Physics (20) 204-207.
[11] V.D. Ovcharenko, A.S. Kuprin, G.N. Tolmachova, I.V. Kolodiy “Deposition of chromium nitride coatings using vacuum arc plasma in increased negative substrate bias voltage”, Vacuum 117 (2015) 27-34.
[12] Luis Carlos Hernández, Luis Ponce “Nanohardness and Residual Stress in TiN Coatings”, Materials 4 (2011) 929-944.
[13] Nguyễn Hữu Thế “Giới thiệu vật liệu và công nghệ”, Trường ĐHKTKTH TP. Hồ Chí Minh (2007).
[14] J. Lin, Z.L. Wu, X.H. Zhang “A comparative study of CrN coatings synthesized by dc and pulse dc magnetron sputtering”, Thin Solid Films 517 (2009) 1887-1891.
[15] Jianliang Lin, John J. Moore, William D. Sproul “The structure and properties of CrN coatings deposited by dual RF magnetron sputtering”, Surface & Coatings Technology 201 (2006) 2320-2329.
[16] Jyh-Wei Lee, Shih-Kang Ten, Yu-Chu Kuo “The Effects of Substrate Bias, Substrate Temperature and Annealing Temperature on Structure and Properties of CrAlN and CrAlSiN Films Deposited by Pulsed Direct Current Reactive Magnetron Sputtering”, Journal of the Chinese Institute of Engineers, Vol. 34, No. 12 (2011) 1484-1492.
[17] Jianliang Lin, William D. Sproul, John J. Moore “High rate deposition of thick CrN and CrN coatings using modulated pulse power (MPP) magnetron sputtering”, Surface & Coatings Technology 205 (2011) 3226-3234.
[18] A.P. Ehiasarian, W.-D. Muen, J. Luhmann “High power pulsed magnetron sputtered TiN films”, Surface and Coatings Technology 163-164 (2003) 267-272.
[19] Jyh-Wei Lee, Shih-Kang Ten “The mechanical properties evaluation of the CrN coatings deposited by the pulsed DC reactive magnetron sputtering”, Surface & Coatings Technology 200 (2006) 3330-3335.