NH3 Gas Detection by Silicon Nanowire - Based Sensors
Main Article Content
Abstract
Gas sensors based on silicon nanowires were used to detect ammonia (NH₃) gas at working temperature, from room temperature to 100 °C. The silicon nanowires were grown on the Si (111) surface using thermal evaporation method with gold (Au) nanoparticles played as catalysts. The Si nanowires, which have an average diameter of 15-30 nm were formed at a temperature of 1100 °C for 60 min and using argon as carrying gas and a mixture of silicon and carbon powders (ratio 1:1) as a material source. The silicon nanowire – based gas sensors showed response to NH₃ gas, but non-response to water vapor, ethanol or acetone. The results of the sensor’s response showed that the NH₃ gas sensor had a high response at working temperature of 80 °C.
Keywords
Gas sensor, silicon nanowires, thermal evaporation
Article Details
References
[1] L. Hu, G. Chen, Analysis of Optical Absorption in Silicon Nanowire Arrays for Photovoltaic Applications, Nano Lett., Vol 7 (2007), pp 3249–3252.
[2] M.-W. Shao, Y.-Y. Shan, N.-B. Wong, S.-T. Lee, Silicon Nanowire Sensors for Bioanalytical Applications: Glucose and Hydrogen Peroxide Detection, Advanced Functional Materials, Vol 15 (2005), pp 1478–1482.
[3] Y. Cui, Z. Zhong, D. Wang, W. U. Wang, C. M. Lieber, High Performance Silicon Nanowire Field Effect Transistors, Nano Lett., Vol 3 (2003), pp 149–152.
[4] Y. Cui, Q. Wei, H. Park, C. M. Lieber, Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species, Science, Vol 293 (2001), pp 1289–1292.
[5] Z. Li, Y. Chen, X. Li, T. I. Kamins, K. Nauka, R. S. Williams, Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires, Nano Lett., Vol 4 (2004), pp 245–247.
[6] D. W. Kwak, H. Y. Cho, and W.-C. Yang, Dimensional evolution of silicon nanowires synthesized by Au-Si island-catalyzed chemical vapor deposition, Physica E, Vol 37 (2007), pp 153–157.
[7] X. T. Zhou, J. U. Hu, C. P. Li, D. D. Ma, C. S. Lee, and S. T. Lee, Silicon nanowires as chemical sensors, Chem. Phys. Lett., Vol 369 (2003), pp 220–224.
[8] E. Zhang, Y. Tang, Y. Zhang, and C. Guo, Synthesis and photoluminescence property of silicon carbon nanowires synthesized by the thermal evaporation method, Physica E, Vol 41 (2009), pp 655–659.
[9] B. Karunagaran, P. Uthirakumar, S. J. Chung, S. Velumani, and E.-K. Suh, TiO₂ thin film gas sensor for monitoring ammonia, Materials Characterization, Vol 58 (2007), pp 680–684.
[10] B. Timmer, W. Olthuis, A. Berg, Ammonia sensors and their applications - a review, Sensors and Actuators B: Chemical, Vol 107 (2005), pp 666–677.
[11] G. S. T. Rao, and D. T. Rao, Gas sensitivity of ZnO based thick film sensor to NH₃ at room temperature, Sensors and Actuators B: Chemical, Vol 55 (1999), pp 166–169.
[12] N. V. Hieu, V. V. Quang, N. D. Hoa, and D. Kim, Preparing large-scale WO₃ nanowire-like structure for high sensitivity NH₃ gas sensor through a simple route, Current Applied Physics, Vol 11 (2011), pp 657–661.
[2] M.-W. Shao, Y.-Y. Shan, N.-B. Wong, S.-T. Lee, Silicon Nanowire Sensors for Bioanalytical Applications: Glucose and Hydrogen Peroxide Detection, Advanced Functional Materials, Vol 15 (2005), pp 1478–1482.
[3] Y. Cui, Z. Zhong, D. Wang, W. U. Wang, C. M. Lieber, High Performance Silicon Nanowire Field Effect Transistors, Nano Lett., Vol 3 (2003), pp 149–152.
[4] Y. Cui, Q. Wei, H. Park, C. M. Lieber, Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species, Science, Vol 293 (2001), pp 1289–1292.
[5] Z. Li, Y. Chen, X. Li, T. I. Kamins, K. Nauka, R. S. Williams, Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires, Nano Lett., Vol 4 (2004), pp 245–247.
[6] D. W. Kwak, H. Y. Cho, and W.-C. Yang, Dimensional evolution of silicon nanowires synthesized by Au-Si island-catalyzed chemical vapor deposition, Physica E, Vol 37 (2007), pp 153–157.
[7] X. T. Zhou, J. U. Hu, C. P. Li, D. D. Ma, C. S. Lee, and S. T. Lee, Silicon nanowires as chemical sensors, Chem. Phys. Lett., Vol 369 (2003), pp 220–224.
[8] E. Zhang, Y. Tang, Y. Zhang, and C. Guo, Synthesis and photoluminescence property of silicon carbon nanowires synthesized by the thermal evaporation method, Physica E, Vol 41 (2009), pp 655–659.
[9] B. Karunagaran, P. Uthirakumar, S. J. Chung, S. Velumani, and E.-K. Suh, TiO₂ thin film gas sensor for monitoring ammonia, Materials Characterization, Vol 58 (2007), pp 680–684.
[10] B. Timmer, W. Olthuis, A. Berg, Ammonia sensors and their applications - a review, Sensors and Actuators B: Chemical, Vol 107 (2005), pp 666–677.
[11] G. S. T. Rao, and D. T. Rao, Gas sensitivity of ZnO based thick film sensor to NH₃ at room temperature, Sensors and Actuators B: Chemical, Vol 55 (1999), pp 166–169.
[12] N. V. Hieu, V. V. Quang, N. D. Hoa, and D. Kim, Preparing large-scale WO₃ nanowire-like structure for high sensitivity NH₃ gas sensor through a simple route, Current Applied Physics, Vol 11 (2011), pp 657–661.