FEM Analysis of High-Selectivity SAW Filter using SPUDT Structure
Main Article Content
Abstract
Wide-band surface acoustic wave (SAW) filters using single-phase unidirectional interdigital transducer (SPUDT) showed promise to achieve low loss and high selectivity. In this paper, the SAW filters were studied via finite element method (FEM) using 2D models and utilized YZ-LiNbO3 for piezoelectric substrate. With respect to the investigated center frequencies of 97 MHz and 179 MHz, the SPUDT SAW filter demonstrated low power losses (26.85 dB and 22.63 dB respectively) and high attenuation band (12.73 dB and 23.95 dB) in comparison to the bidirectional SAW filter. It was also identified that the changes in different electrode factors including the material, the thickness, and the quantity had influences on the SPUDT-type filter response.
Keywords
SAW filter, SPUDT, FEM
Article Details
References
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[9] H. Oh, K. Lee, K. Eun, S.-H. Choa and S. S. Yang, Development of a High-Sensitivity Strain Measurement System based on a SH SAW Sensor, Journal of Micromechanics and Microengineering (2012).
[10] M. M. E. Gowini and W. A. Moussa, A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis, Sensors 9 (2009) 9945-9964.
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[13] T. Kodama, H. Kawabata, Y. Yasuhara and H. Sato, Design of Low-Loss SAW Filters Employing Distributed Acoustic Reflection Transducers, IEEE Ultrasonic Symposium (1986) 59-64.
[14] H. M. Tran, P. H. Nguyen, L. K. Linh, D. V. Nguyen H. T. L. Nguyen, H. T. Nguyen and H. S. Hoang, 2D Simulation of High Frequency Filter based on Surface Acoustic Wave Principle using Quartz Piezoelectric Substrate, in 3rd Vietnam Conference on Control and Automation, Thai Nguyen (2015).
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[16] M. Kadota, Y. Kuratani, T. Kimura, M. Esashi and S. Tanaka, Ultra-Wideband and High Frequency Resonators using Shear Horizontal Type Plate Wave in LiNbO3 Thin Plate, Japanese Journal of Applied Physics 53 (2014).
[17] D. Ciplys and R. Rimeika, Measurements of Electromechanical Coupling Coefficient for Surface Acoustic Waves in Proton-Exchanged Lithium Niobate, Applied Physics Letters (1998) 14-20.
[18] M. M. E. Gowini and W. A. Moussa, A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor, Sensors 10 (2010) 1232-1250.
[19] T. Omori, S. Nakagomi, H. Tanaka, H. Asano, K.-y. Hashimoto and M. Yamaguchi, SAW Reflection Characteristics of Cu Electrodes and their Application to SAW IF Devices, IEEE Ultrasonics Symposium (2002) 19-23.
[20] A. K. Namdeo and H. B. Nemade, FEM Study on the Effect of Metallic Interdigital Transducers on Surface Acoustic Wave (SAW) Velocity in SAW Devices, in The 2011 COMSOL Conference, Bangalore (2011).
[2] D. Morgan, Surface Acoustic Wave Filters With Applications to Electronic Communications and Signal Processing, Northampton: Elsevier, (2007).
[3] S. Nakagomi, H. Asano, H. Tanaka, T. Omori, K.-y. Hashimoto and M. Yamaguchi, Single-Phase Unidirectional Surface Acoustic Wave Transducer Using Cu Electrode, Japanese Journal of Applied Physics 42 (2003) 3152-3156.
[4] C. C. Ruppel, Acoustic Wave Filter Technology - A Review, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, (2016).
[5] V. Ionescu, Design and Analysis of A Rayleigh SAW Resonator For Gas Detecting Applications," Romanian Journal of Physics 60 (2015) 502-511.
[6] H. Jiang, W. Lu, S. Shen and Z. Xie, Study of a low insertion loss SAW filter with SPUDT structure using YZ-LiNbO3, Applied Mechanics and Materials 251 (2013) 139-142.
[7] A. C. Pyman, J. M. Deacon, W. Gibson, R. S. Bains, J. D. Galipeau, T. M. Lindemayer and F. Z. Bi, "Using SPUDT Structure to Design High Selectivity W- CDMA Base Station Filters, IEEE Ultrasonics Symposium, (2001) 279-282.
[8] E. J. Danicki, Spectral Theory of Single-Phase Unidirectional Transducers, (2005).
[9] H. Oh, K. Lee, K. Eun, S.-H. Choa and S. S. Yang, Development of a High-Sensitivity Strain Measurement System based on a SH SAW Sensor, Journal of Micromechanics and Microengineering (2012).
[10] M. M. E. Gowini and W. A. Moussa, A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis, Sensors 9 (2009) 9945-9964.
[11] M. M. Elsherbini, M. F. Elkordy and A. M. Gomaa, Finite Element Method Simulation for SAW Resonator-Based Sensors, International Electrical Engineering Journal 7 (2016) 2167-2172.
[12] C. S. Hartmann and B. P. Abbott, Overview of Design Challenges for Single Phase Unidirectional SAW Filter, IEEE Ultrasonics Symposium (1989) 79-89.
[13] T. Kodama, H. Kawabata, Y. Yasuhara and H. Sato, Design of Low-Loss SAW Filters Employing Distributed Acoustic Reflection Transducers, IEEE Ultrasonic Symposium (1986) 59-64.
[14] H. M. Tran, P. H. Nguyen, L. K. Linh, D. V. Nguyen H. T. L. Nguyen, H. T. Nguyen and H. S. Hoang, 2D Simulation of High Frequency Filter based on Surface Acoustic Wave Principle using Quartz Piezoelectric Substrate, in 3rd Vietnam Conference on Control and Automation, Thai Nguyen (2015).
[15] J. Kirschner, Surface Acoustic Wave Sensors (SAWS): Design for Application, Microelectromechanical Systems (2010).
[16] M. Kadota, Y. Kuratani, T. Kimura, M. Esashi and S. Tanaka, Ultra-Wideband and High Frequency Resonators using Shear Horizontal Type Plate Wave in LiNbO3 Thin Plate, Japanese Journal of Applied Physics 53 (2014).
[17] D. Ciplys and R. Rimeika, Measurements of Electromechanical Coupling Coefficient for Surface Acoustic Waves in Proton-Exchanged Lithium Niobate, Applied Physics Letters (1998) 14-20.
[18] M. M. E. Gowini and W. A. Moussa, A Finite Element Model of a MEMS-based Surface Acoustic Wave Hydrogen Sensor, Sensors 10 (2010) 1232-1250.
[19] T. Omori, S. Nakagomi, H. Tanaka, H. Asano, K.-y. Hashimoto and M. Yamaguchi, SAW Reflection Characteristics of Cu Electrodes and their Application to SAW IF Devices, IEEE Ultrasonics Symposium (2002) 19-23.
[20] A. K. Namdeo and H. B. Nemade, FEM Study on the Effect of Metallic Interdigital Transducers on Surface Acoustic Wave (SAW) Velocity in SAW Devices, in The 2011 COMSOL Conference, Bangalore (2011).