SnO2/Pt (40nm/10nm) Thin Films Sensitized for Enhanced H2 Gas Sensing
Main Article Content
Abstract
Detection and alarm of leakage of hydrogen (H₂) gas is crucially important for safety use. In this study, we dedicate on the fabrication of H₂ gas sensors based on SnO₂ thin film sensitized with Pt islands. The H₂ gas sensors based on thin film of SnO₂ (40 nm) sensitized by Pt (10 nm) islands were deposited by reactive sputtering method using Sn and Pt targets for the fabrication of sensor chips. The optimized sensor could be used for monitoring hydrogen gas at low concentrations of 25–250 ppm, with a linear dependence to H₂ concentration and a fast response and recovery time (2–35 seconds).
Keywords
SnO2/Pt thin film, Gas sensors, H2
Article Details
References
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[5] M. Abinaya, R. Pal, and M. Sridharan; Highly sensitive room temperature hydrogen sensor based on undoped SnO₂ thin films, Solid State Sci., vol. 95, p. 105928, April 2019.
[6] M. K. Verma, V. Gupta, and S. Member; Enhanced Response of Pd Nanoparticle – Loaded SnO₂ Thin Film Sensor for H₂ Gas, IEEE Sensors Journal, vol. 12, no. 10, pp. 2993–2999, 2012.
[7] D. Haridas, A. Chowdhuri, K. Sreenivas, and V. Gupta; Effect of thickness of platinum catalyst clusters on response of SnO₂ thin film sensor for LPG, Sensors Actuators B Chem., vol. 153, no. 1, pp. 89–95, Mar. 2011.
[8] D. Haridas and V. Gupta; Enhanced response characteristics of SnO₂ thin film based sensors loaded with Pd clusters for methane detection, Sensors Actuators B Chem., vol. 166, no. 1, pp. 156–164, May 2012.
[9] A. Sharma, J. Kumar, M. Tomar, A. Umar, and V. Gupta; Sensors and Actuators B: Chemical Metal clusters activated SnO₂ thin film for low level detection of NH₃ gas, Sensors Actuators B Chem., vol. 194, pp. 410–418, 2014.
[10] B. Lin, F. Jia, B. Lv, Z. Qin, P. Liu, and Y. Chen; Facile synthesis and remarkable hydrogen sensing performance of Pt-loaded SnO₂ hollow microspheres, Mater. Res. Bull., vol. 106, pp. 403–408, Jun. 2018.
[11] G. Korotcenkov and B. K. Cho; Thin film SnO₂-based gas sensors: Film thickness influence, Sensors Actuators B Chem., vol. 142, no. 1, pp. 321–330, Oct. 2009.
[12] R. Huck, U. Bktger, D. Kohl, and G. Heiland; Spillover effects in the detection of H₂ and CH₄ by sputtered SnO₂ films with Pd and PdO deposits, Sensors Actuators B, vol. 17, pp. 355–359, 1989.
[13] J. Zhang and K. Colbow; Surface silver clusters as oxidation catalysts on semiconductor gas sensors, Sensors Actuators B Chem., vol. 40, pp. 47–52, 1997.
[14] N. Van Toan, N. Viet Chien, N. Van Duy, H. Si Hong, H. Nguyen, N. Duc Hoa, and N. Van Hieu; Fabrication of highly sensitive and selective H₂ gas sensor based on SnO₂ thin film sensitized with microsized Pd islands, J. Hazard. Mater., vol. 301, pp. 433–442, 2016.
[15] I. Kosc, I. Hotovy, V. Rehacek, R. Griessler, M. Predanocay, M. Wilke, and L. Spiess; Sputtered TiO₂ thin films with NiO additives for hydrogen detection, Appl. Surf. Sci., vol. 269, pp. 110–115, 2013.
[16] C. Campus and V. Salaria; Pt/SnO₂ nanowires/SiC MOS devices, Int. J. on Smart Sensing and Intelligent Systems, vol. 1, no. 3, pp. 771–783, September 2008.
[17] S. Dhall, M. Kumar, M. Bhatnagar, and B. R. Mehta; ScienceDirect Dual gas sensing properties of graphene-Pd/SnO₂ composites for H₂ and ethanol: Role of nanoparticles-graphene interface, Int. J. Hydrogen Energy, pp. 2–8, 2018.
[18] S. Rane, S. Arbuj, S. Rane, and S. Gosavi; Hydrogen sensing characteristics of Pt/SnO₂ nano-structured composite thin films, J. Mater. Sci. Mater. Electron., vol. 26, no. 6, pp. 3707–3716, 2015.
[19] N. Van Duy, N. D. Hoa, and N. Van Hieu; Effective hydrogen gas nanosensor based on bead-like nanowires of platinum-decorated tin oxide, Sensors Actuators B Chem., vol. 173, pp. 211–217, Oct. 2012.