Energy Focusing Efficiency Estimation of a Multi-Level Fresnel Lens Through Surface Profile
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Abstract
A high focusing efficiency of a multi-level Fresnel lens is desired when it is designed and manufactured. How to determine the focusing efficiency becomes a problem after the Fresnel lens is fabricated. A method to estimate the focusing efficiency of the Fresnel lens basing on its surface profile is proposed. Hence, the profile of Fresnel lens fabricated shows how similar with the profile designed, which has been theoretically predicted a maximal focusing efficiency such as 40.5% and 81% for a two-phase and four-phase level Fresnel lenses, respectively. This calculation method can be applied to estimate the focusing efficiency of any surface profile of Fresnel lenses fabricated without a direct measurement of focusing efficiency. The focusing efficiency of a four-phase level Fresnel lens designed to operate at a frequency of 100 MHz of an ultrasonic ejector, which was fabricated by a two-mask process using SU-8 photoresist, approximate 60% is illustrated.
Keywords
Fresnel lens, Ultrasonic, Energy focusing efficiency
Article Details
References
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[2] H. Fukumoto, J. Aizawa, H. Matsuo, H. Narumiya, and K. Nakagawa, "Liquid Ejector Which Uses a High-Order Ultrasonic Waves to Eject Ink Droplets and Printing Apparatus Using Same," US Patent, No. 6155671, 2000.
[3] J. Aizawa, H. Fukumoto, and M. Takeda, "Liquid Ejector," US Patent, No. 6692106B2, 2003.
[4] B. Hadimioglu, S. A. Elrod, D. L. Steinmetz, M. Lim, J. C. Zesch, B. T. Khuri-Yakub, E. G. Rawson, and C. F. Quate, "Acoustic Ink Printing," in Proc. 1992 IEEE Ultrason. Symp., pp. 929-935, 1992.
[5] B. Hadimioglu, E. G. Rawson, R. Lujan, M. Lim, J. C. Zesch, B. T. Khuri-Yakub, and C. F. Quate, "High-Efficiency Fresnel Acoustic Lenses," in Proc. 1993 IEEE Ultrason. Symp, pp. 579-582, 1993.
[6] B. Hadimioglu, S. Elrod, and R. Sprague, "Acoustic Ink Printing: an Application of Ultrasonics for Photographic Quality Printing at High Speed," in Proc. 2001 IEEE Ultrason. Symp., pp. 627-635, 2001.
[7] C. F. Quate, E. G. Rawson, and B. Hadimioglu, "Mutlti-Discrete-Phase Fresnel Acoustic Lenses and Their Application to Acoustic Ink Printing," US Patent, No. 5041849, 1991.
[8] D. Huang and E. S. Kim, "Micromachined Acoustic-Wave Liquid Ejector," Journal of Microelectromechanical Systems, Vol. 10 (3), pp. 442-449, 2001.
[9] C.-Y. Lee, H. Yu, and E. S. Kim, "Acoustic Ejector with Novel Lens Employing Air-Reflectors," in Proc. 19th IEEE Int. Conf. Micro Electro Mechanical Systems (MEMS 2006), pp. 170-173, 2006.
[10] S. C. Chan, M. Mina, S. S. Udpa, L. Udpa, and W. Lord, "Finite Element Analysis of Multilevel Acoustic Fresnel Lenses," IEEE Transactions on Ultrasonics, Ferrolectrics, and Frequency Control, Vol. 43 (4), pp. 670-677, 1996.
[11] U. Levy, D. Mendlovic, and E. Marom, "Efficiency analysis of diffractive lenses," J. Opt. Soc. Am. A, Vol. 18 (1), pp. 86-93, 2001.
[12] M.-C. Pan, T.-A. Bui, Y.-C. Nien, and W.-C. Shih, "Design and Fabrication of Fresnel Lens and ZnO Thin-Film Transducer," Japanese Journal of Applied Physics, Vol. 50 (7), 07HD02, 2011.
[13] H. Xiao, Introduction to Semiconductor Manufacturing Technology: Prentice Hall, New Jersey, 2001.