Noise Sources of a 16 Mfps Video Camera
Main Article Content
Abstract
We developed an ultra-high-speed and ultra-high-sensitivity image sensor operating at 16,000,000 fps at its highest frame rate with 165,000 pixels and capable of continuous imaging of 117 frames. The ultra-high-sensitivity is supported by Backside illumination and Charge Carrier Multiplication, CCM. Through evaluation of the sensor, we found problems such as hole accumulation at the backside, sensitivity adjustment along the center lines, direct intrusion of incident light to the in-situ memory area during mechanical shutter closing, etc... They obstructed the sensor performance, especially the ultra-high-sensitivity. These problems are summarized with sources of signal attenuation and other noises common to image sensors. In this paper, countermeasures to some of these problems are also proposed.
Keywords
ISIS, CCD, Ultra high speed, High sensitivity, Image sensor.
Article Details
References
[1] Cuong Vo Le, T. Goji Etoh, H. D. Nguyen, V. T. S. Dao, H. Soya, M. Lesser, D. Ouellette, H. van Kuijk, J. Bosiers, and G Ingram: A Backside-Illuminated Image Sensor with 200,000 Pixels Operating at 250,000 Frames per Second, IEEE Transactions on Electron Devices, 56,11, (2009) 2556-2562.
[2] Etoh, T. G., Nguyen, H. D., Dao, V. T. S., Vo, L. C., Tanaka, M., Backside illuminated CCD operating at 16,000,000 frame per second with sub-ten-photon sensitivity, Journal of Nuclear Instruments and Methods in Physics Research, Section A, Volume 647. Issue 1, (2011) 112-116.
[3] Etoh, T. G; Hayashida, T.; Maruyama, H.; Arai, T.; Uchiyama, N.; Sakamoto, T. Backside illuminated image sensors manufactured with gradated double epitaxial layers: an application to a high-speed high-sensitivity image sensor. In Proceedings of the International Image Sensor Workshop (IISW), Bergen, Norway, June 26-28 (2009).
[2] Etoh, T. G., Nguyen, H. D., Dao, V. T. S., Vo, L. C., Tanaka, M., Backside illuminated CCD operating at 16,000,000 frame per second with sub-ten-photon sensitivity, Journal of Nuclear Instruments and Methods in Physics Research, Section A, Volume 647. Issue 1, (2011) 112-116.
[3] Etoh, T. G; Hayashida, T.; Maruyama, H.; Arai, T.; Uchiyama, N.; Sakamoto, T. Backside illuminated image sensors manufactured with gradated double epitaxial layers: an application to a high-speed high-sensitivity image sensor. In Proceedings of the International Image Sensor Workshop (IISW), Bergen, Norway, June 26-28 (2009).