Study and Design of Micro Gripper Driven by Electrothermal V - Shaped Actuator
Main Article Content
Abstract
This paper presents a design, calculation, simulation and fabrication of micro gripper driven by the electrothermal V-shaped actuator. The working principle of the V-shaped actuator is based on the thermal expansion of a thin beam when applying a voltage. The advantages of this design are large displacement amplification factor, large driving force, low voltage, simple configuration and control. The maximum displacement of each jaw can be up to 40µm at the calculated voltage of 17.35 V and low operating frequency. Simulating displacement of the micro gripper in ANSYS Multiphysics shows an average voltage deviation of 5.98% in comparison with calculation at the same displacement. The micro gripper has been fabricated successfully by using MEMS technology and SOI wafer.
Keywords
Micro gripper, V-shaped actuator, Bulk-micromachining, Silicon on insulator (SOI) wafer.
Article Details
This work is licensed under a Creative Commons Attribution-NonCommercial 4.0 International License.
References
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[3] A. Potekhina and C. Wang, Review of Electrothermal Actuators and Applications, Actuators, 8(4), 2019. https://doi.org/10.3390/act8040069.
[4] H. D. Espinosa, Y. Zhu, and N. Moldovan, Design and operation of a MEMS-based material testing system Automotive Mechanics Conference - IEEE, 2007. https://ieeexplore.ieee.org/document/4367751. https://doi.org/10.1109/CERMA.2007.4367751
[6] Z. Zhang, Y. Yu, . X. Liu and X. Zhang, Dynamic modelling and analysis of V- and Z-shaped electrothermal microactuators, Microsyst Technol., vol. 23, pp. 3775-3789, 2017. https://doi.org/10.1007/s00542-016-3180-0.
[7] J. K. Luo, A. J. Flewitt, S. M. Spearing, N. A. Fleck and W. I. Milne, Comparison of microtweezers based on three lateral thermal actuator configurations, J. Micromech. Microeng, vol. 15, pp. 1294-1302, 2005. https://doi.org/10.1088/0960-1317/15/6/022.
[8] Z. Zhang, Y. Yu, X. Liu and X. Zhang, A comparison model of V- and Z-shaped electrothermal microactuators, International Conference on Mechatronics and Automation - IEEE, pp. 1025-1030, 2015. https://ieeexplore.ieee.org/document/7237626. https://doi.org/10.1109/ICMA.2015.7237626
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[10] Q. Ji and K. L. Scott, First Order Modeling of Thermal Actuators in SUGAR, Department of Electrical Engineering and Computer Sciences, University of California, Berkeley. Technical note. 2002. https://people.eecs.berkeley.edu/~pister/245/project/JiScott.pdf
[11] T. D. Nguyen, H. P. Pham and Q. Đ. Nguyen, Modification and simulation of electrothermal micromotor, The 3rd National Conference on Control and Automation-VCCA, 2015. (Vietnamese).
[12] T. D. Nguyen, T. K. Hoang and P. H. Pham*, Larger displacement of silicon electrothermal V-shaped actuator using surface sputtering process, Microsyst Technol., vol. 27, no. 5, pp. 1985-1991, 2021. https://doi.org/10.1007/s00542-020-04985-5.
[13] Pham Hong Phuc, Nguyen Tien Dung, Hoang Trung Kien, “Design and Fabrication of the micro actuators based on MEMS-Technique”, Science and Technics Publishing House - 2020 (Book in Vietnamese).
[5] J. Varona, M. Tecpoyotl-Torres and A. A. Hamoui, Modeling of MEMS thermal actuation with external heat source, Proceeding of Electronics, Robotics and