Improvement of optical setup of the novel 2D single-shot comb-based interferometer for high-resolution measurement
Main Article Content
Abstract
The novel 2D single-shot comb-based interferometer introduces a massive potential for inline inspection in the industrial chain. The system's advantages are based on a novel optical setup, which combines a new customized infrared pseudo comb light source with a reflected blaze grating acting as a spatial phase modulator. The optical comb source with multiple comb order introduces the system's fantastic ability to extend the measurement range far from the traditional interferometers. At the same time, the grating modulates the incident light into a 2D reference with a delaying optical path difference to provide a real-time profilometry and tomography ability. This research analyzes the optical design to optimize the specifications of the grating and optical imaging lens. Optimized the optics specification improves the profilometry resolution up to the micrometer scale, which was considered impossible in the previous system. Additionally, using the unique infrared pseudo frequency sweeping laser as the comb source, the system minimizes the natural speckle-noise effect from the optics, which is the barrier of all typically visible measurement systems. The experiment was successfully conducted to calibrate the new specifications of the system, followed by the experiment measuring the only 1 μm displacement of the mirror to discover the profilometry resolution improvement. The system's ability to measure the scattering sample is also investigated by the experiment inspecting the profile of a Japanese 10-yen coin. The research proves the 2D single-shot comb-based interferometer as one of the most powerful optical devices for industrial inline inspection.
Keywords
Optical profilometry, optical frequency comb, spatial phase modulator, high-resolution
Article Details
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References
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[8] Tuan Cong Truong, Tuan Quoc Banh, Heuihyeon Kim, Tatsutoshi Shioda, Axial zoomable 2D single-shot comb interferometry using spatial phase modulator for profilometry and tomography, Opt. Commun. 439, (2019), 276-283. https://doi.org/10.1016/j.optcom.2019.01.029
[9] Tuan Cong Truong, Tuan Quoc Banh, Tatsutoshi Shioda, Development of discrete frequency swept laser for 2D single-shot pseudo comb interferometry, Jpn. J. Appl. Phys. 58 056503 (2019). https://doi.org/10.7567/1347-4065/ab0a7f
[2] D. Huang, E.A. Swanson, C.P. Lin, J.S. Schuman, W.G. Stinson, W. Chang, M.R.Hee, T. Flotte, K. Gregory, C.A. Puliafito, J.G. Fujimoto, Optical coherence tomography, Sci. 254 (1991) 1178 https://doi.org/10.1126/science.1957169
[3] Leslie Deck, Peter de Groot, High-speed noncontact profiler based on scanning white-light interferometry, Appl. Opt.33 (31) (1994). https://doi.org/10.1364/AO.33.007334
[4] R. Leitgeb, M. Wojtkowski, A. Kowalczyk, C. K. Hitzenberger, M. Sticker, and A. F. Fercher, Spectral measurement of absorption by spectroscopic frequency-domain optical coherence tomography, Opt. Lett.25 (2000) 820. https://doi.org/10.1364/OL.25.000820
[5] Samuel Choi, Mitsufumi Yamamoto, Daisuke Moteki, Tatsutoshi Shioda, Yosuke Tanaka, and Takashi Kurokawa, Frequency-comb-based interferometer for profilometry and tomography, Opt. Lett.31 (2006). https://doi.org/10.1364/OL.31.001976
[6] T. Shioda, T. Morisaki, and H. Ono, Single-shot tomography by means of VIPA and spatial phase modulator installed optical interferometer, Opt. Commun. 284, 144–147. https://doi.org/10.1016/j.optcom.2010.09.028
[7] Tuan Quoc Banh, Kohei Suzuki, Munehiro Kimura, and Tatsutoshi Shioda, Two-dimensional high-speed and long-range tomography and profilometry using liquid-crystal Fabry–Perot resonator, Appl. Opt. 54, 912 (2015). https://doi.org/10.1364/AO.54.000912
[8] Tuan Cong Truong, Tuan Quoc Banh, Heuihyeon Kim, Tatsutoshi Shioda, Axial zoomable 2D single-shot comb interferometry using spatial phase modulator for profilometry and tomography, Opt. Commun. 439, (2019), 276-283. https://doi.org/10.1016/j.optcom.2019.01.029
[9] Tuan Cong Truong, Tuan Quoc Banh, Tatsutoshi Shioda, Development of discrete frequency swept laser for 2D single-shot pseudo comb interferometry, Jpn. J. Appl. Phys. 58 056503 (2019). https://doi.org/10.7567/1347-4065/ab0a7f